Formation of Nano-Tree and Nano-Ring Structures from Au-Si-Ge Eutectic Solids

Nanostructures of Au-Si-Ge eutectic lamella grown under SiO
2
/Si
3
N
4
templates have been studied. The eutectic lamella were contained in micro-crucibles, fabricated using conventional lithographic processes, defined by pre-patterned Au on a Si substrate which then placed into a CVD chamber with GeH
4
flow rate of 4 sccm at 375 °C for 1h. This growth condition resulted in no vapor-liquid-solid (VLS) grown Ge films (before supersaturation state was reached) during growth. Instead, Au-Si-Ge eutectic lamella was formed as the eutectic liquid reached room temperature resulting in nano-tree and nano-ring structures. These two different nanostructures were found to strongly depend on the template geometries.