Si-based composite-dimensional photonic crystals towards Si photonics

Three types of Si-based photonic crystal structures are investigated: 2D SOI photonic crystal slabs, 3D Si/SiO/sub 2/ drilled alternating-layer photonic crystals, and 3D/2D hybrid photonic crystals. The pros and cons of these structures in relation to the development of ultra-small large-scale photonic integrated circuits are discussed.