Interferometric set-up for assessment of a microphotonic pressure sensor

For the assessment of a microphotonic pressure sensor device we developed two experimental set-up to have a realistic evaluation of the sensor characteristics. First we used a silicon wafer of 125 (5") mm diameter, as a manometer membrane, in a Fizeau interferometer; to evaluate the global behavior of the wafer; we observed the deformation pattern of the wafer and its mechanical characteristics. From the experimental data obtained we evaluated the possible characteristics of the micro-membrane used in the pressure sensor. The second step will be to measure directly with the Michelson microscopic interferometer, the displacement of the micromembrane as a function of pressure.