Research on the Noises Analysis of the MEMS Inertial Sensor Array

Aiming at the defects of consumer-grade MEMS inertial sensors, which are large random noise and poor stability, a MEMS inertial sensor array (MEMS ISA) is designed in this paper. Firstly, different noise models of MEMS inertial sensors are established. Then, for different noise models, the principle of noise reduction and performance equivalence relationships of MEMS ISA are analyzed. Finally, the simulation and system tests are designed to verify the performance of the proposed method in this paper. The simulation and system results show that MEMS ISA composed of M inertial sensors can effectively reduce the random noise. And the noise coefficient of MEMS ISA is reduced to $1/\sqrt M $ when using an array of M devices instead of a single one. This is consistent with the theoretical analysis.