A micromachined tunable CPW resonator

This paper presents a novel tunable microwave resonator, consisting of a CPW spiral inductor with a cantilever interconnect structure. Tuning was achieved by applying a DC bias between the input and output of the resonator circuit. An observable resonance tuning between 3 and 7 GHz was accomplished by applying a bias from 0 to 40 V. Corresponding Q-factors between 17 and 20 were obtained in this tuning range.