Handling AFM cantilever chips by a force feedback-based micromanipulation system

In Atomic Force Microscopy (AFM) micromachined tips located on silicon cantilevers are used to scan and characterize surfaces in the nanometer range. Cantilever chips have to be cut manually from the wafer by means of a razor blade and then grasped, positioned and glued to the AFM tip holder. This operation, even if performed by trained operators, has a 70% yield rate. This paper describes step by step the same task performed by a force feedback-based micromanipulation system developed in the authors' laboratory. The 100% yield rate achieved is a very impressive result, considering that unskilled operators have carried out the tests.