Assembly of Miniature Nanoantenna Spatial Light Modulator

An assembly method was proposed for a novel class of Spatial Light Modulator (SLM) based on metasurfaces embedded in an ultra-thin liquid crystal (LC) cell. The LC cell is based on an ultra-thin gap (as small as 500nm) created between the superstrate (Indium Tin Oxide (ITO) coated glass) and the underlying metasurfaces on device's surface. The establishment of the ultra-thin LC cell is not a trivial process. Six different adhesives were test-out together with different force and temperature to achieve the ultra-thin LC cell. The ultra-thin gap is measured using interferometric method with Ocean Optics (DH-2000) spectrometer. The ultra-thin LC cell is achieved using UV-adhesive together with optimized process flow and parameters.