Operator based robust nonlinear position control of linear slider

Linear slider is a linear actuator. It uses a stage to make semiconductor devise and linear motor car because it has the characteristic of low friction and high–speed response. In this paper, nonlinear model considering the position dependance of interlinkage flux of linear motor is proposed. The plant is compensated by operator based nonlinear position controller and the proposed model. The effectiveness of the controller and model is confirmed by simulation of comparing linear model and nonlinear model.