Application of Two Degree-of-Freedom Vibrational Energy Harvesting Theory to Real Environmental Vibration

A 2-DOF (degree-of-freedom) MEMS vibrational energy harvester has been developed to supply power to a factory monitoring sensor system. Frequency bandwidth is broadened to enhance the output power by designing the spring constant and the mass of the interposer according to the conditions of the vibrational source. A maximum output power of 600 μW is obtained from machines used in a factory.