A Review of Compliance Design for Semiconductor Fabrication Equipment

In order to fulfill a great demand of IoT and 5G technology, more and more Semiconductor Fabrication Equipment (SFE) have been manufactured. The fastest and most accurate machinery have been launched to the semiconductor industry. Without stringent and smart manufacturing consideration, it would lead the customers' safety risk. This review article introduces the newest European Union (EU) and United States (US) regulatory requirement and propose a detail compliant design rationale for SFE manufacturer. This article is a comprehensive tool for designer to understand the compliance design solution and implementation measures.