MEMS for IT applications

The recent progress of MEMS in Samsung Advanced Institute of Technology (SAIT) is presented, focusing on MEMS applications to information technology (IT). The items introduced include: (1) a MEMS gyroscope for consumer electronics; (2) an electrostatic secondary stage MEMS actuator for high density HDD; (3) a micro cooling system for cooling of high performance chips; and (4) a RF MEMS switch for mobile phones. Emphases are given to the factors affecting the commercial success of MEMS as well as the impact of MEMS on future IT.