Design of a Multi-DoF MEMS Gyroscope for Inertial Navigation Considering SOI-MUMPs Microfabrication Process Constraints

This work presents the design and analysis of robust non-resonant microelectromechanical system (MEMS) gyroscope with a high resolution, large dynamic range as well as a wide bandwidth. The proposed 3-DoF MEMS gyroscope is designed using the commercially available microfabrication process of SOIMUMPs, with silicon as the structural layer with a thickness of 25μm. Parametric optimization is performed to get the optimal design parameter values using the developed mathematical model for the system. The system is electrostatically actuated and achieves a dynamic amplification of 2.89 in the drive direction. The proposed design has a bandwidth of 1.772 kHz and a sensitivity of 3.27 mV/(°/s). The resolution of the proposed design is found to be 0.18 °/s and the maximum measurable angular rate is 5154.6 °/s.