A CMOS MEMS Pressure Sensor for Blood Pulse and Pressure Measurement Applications

A CMOS MEMS pressure sensor for blood pulse and pressure measurement applications is proposed. A capacitive MEMS sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure. A readout circuit is designed and integrated with the MEMS sensor. The capacitive MEMS sensor has a sensitivity of 6.53 fF/kPa with a sensing range of 4-40 kPa (30-300 mmHg). The overall system has a measured conversion gain of 4.72 mV/kPa. The power dissipation of the whole circuit is only 6.46 μW.