Peculiarities of Phase Composition and Porosity Determination of Multilayer Porous Silicon Structures by X-ray Methods

In this work, the X-ray reflectivity and ultrasoft X-ray emission spectroscopy were used to study the porosity and phase composition of the surface layer of porous silicon samples obtained under various technological parameters. A decrease in the density of the porous silicon layer leads to a change in the position of the critical angle of total external reflection which makes it possible to calculate the porosity.