TCAD‐Based Mixed‐Mode ESD Protection Designs

Nowadays, simulation becomes indispensable in integrated circuit (IC) design practices, which is just true for on‐chip electrostatic discharge (ESD) protection designs. This chapter focuses on TCAD‐based ESD protection simulation design methods. To accurately address the complex multiple‐coupling effects of ESD protection network at full‐chip level, a TCAD‐based mixed‐mode ESD simulation‐design methodology can be used to achieve design optimization and prediction of ESD protection circuit at chip level. Several practical ESD protection design examples are discussed using the TCAD‐based mixed‐mode ESD simulation‐design methodology to show its design capability. TCAD is powerful that can facilitate not only process‐ and device‐level simulation, but also circuit‐level simulation including ESD protection simulation through integrated and interactive device–circuit‐level interaction at chip level.