Switched Piezoelectric SAW Resonator Using Vanadium Oxide

This paper presents implementation of a switched surface acoustic wave (SAW) piezoelectric resonator. The ON/OFF switching of acoustic resonance is achieved using vanadium oxide (VO
2
) switches monolithically integrated with the piezoelectric resonator. High coupling coefficient and resonator Q values are achieved using multi-layered LiTaO
3
/SiO
2
/Si stack. The resonator has a resonance frequency at 791 MHz with an electromechanical coupling coefficient of k
t
²
=10.2% and a Q of 400. Power handling performance of the proposed switched SAW resonator is also presented. The VO
2
switch does not have any significant impact on the resonator Q and its power handling capability.