Carbon Nanotubes/Polymer Films for Microsensors Applications

This work presents a simple fabrication method for piezoresistive polymer films with two polymers commonly used in microelectronics: polyimide, and polydimethylsiloxane. The films were produced by direct mixing of carbon nanotubes in the polymer for spin coating on a silicon wafer. The proposed method produces a homogeneous material, which requires less processing time and complexity compared to the conventional solvent/ultrasonic method. The produced films exhibited piezoresistive response under strain tests and thermoresistive properties, indicating their potential use for further fabrication of piezoresistive and thermoresistive microsensors.