DC electric field sensor based on polyimide substrate

An electric field sensor based on polyimide flexible PCB substrate was developed and tested. This device leveraged a commercial flexible PCB manufacturing process for fabrication, which lowered the cost. The polyimide material exhibited increased durability and shock resistance compared to earlier silicon micromachined sensors. This electrostatic force based sensor showed linear response to incident dc electric field, and a sensitivity of 3.6 V (kV/m)
^-1
, and a noise limited resolution of 6.4 V/m.