Fabrication of /spl beta/"-alumina films as a thermoelectric material by thermal plasma processing

The fabrication of /spl beta/"-alumina films, as a thermoelectric material, by thermal plasma processing based on the forced constrictive type reactor was investigated. Under both atmospheric and low pressure, /spl beta/"-alumina films were successfully synthesized from mixed powder of /spl alpha/-Al/sub 2/O/sub 3/, Na/sub 2/CO/sub 3/ and MgO. The jet power and substrate position strongly affect the properties of plasma processed /spl beta/"-alumina, which was found to be correlated with jet temperature. For both pressures, the films show good thermoelectric properties.