Silicon Photonic Microring Resonators: A Comprehensive Design-Space Exploration and Optimization Under Fabrication-Process Variations

Silicon photonic microring resonators (MRRs) offer many advantages (e.g., compactness) and are often considered as the fundamental building block in optical interconnects and emerging photonic nanoprocessors and accelerators. Such devices are, however, sensitive to inevitable fabrication-process variations (FPVs) stemming from optical lithography imperfections. Consequently, silicon photonic integrated circuits (PICs) integrating MRRs often suffer from high power overhead required to compensate for the impact of FPVs on MRRs and, hence, realizing a reliable operation. On the other hand, the design space of MRRs is complex, including several correlated design parameters, thereby further exacerbating the design optimization of MRRs under FPVs. In this article, we present, for the first time, a comprehensive design-space exploration in passive and active MRRs under FPVs. In addition, we present design optimization in MRRs under FPVs while considering different performance metrics, such as tolerance to FPVs, quality factor, and 3-dB bandwidth in MRRs. Simulation and fabrication results obtained by measuring multiple fabricated MRRs designed using our design-space exploration demonstrate a significant 70% improvement on average in the MRRs’ tolerance to different FPVs. Furthermore, we apply the proposed design optimization to a case study of a wavelength-selective MRR-based demultiplexer, where we show considerable channel-spacing accuracy within 0.5 nm even when the MRRs are placed 500
$\mu \text{m}$
apart on a chip. Such improvements indicate the efficiency of the proposed design-space exploration and optimization to enable power-efficient and variation-resilient PICs and optical interconnects integrating MRRs.