A precision capacitance cell for measurement of thin film out-of-plane expansion. III. Conducting and semiconducting materials

For pt. II see Rev. Sci. Instrum., vol. 70, pp. 2424-2431 (1999).This paper describes the construction, calibration, and use of a precision capacitance-based metrology for the measurement of the thermal and hygrothermal (swelling) expansion of thin films. It is demonstrated that with this version of our capacitance cell, materials ranging in electrical properties from insulators to conductors can be measured. The results of our measurements on p-type <100>-oriented single crystal silicon are compared to the recommended standard reference values from the literature and are shown to be in excellent agreement.