Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer With a High Extinction Ratio

There is a growing interest to fabricate robust terahertz (THz) multilayer components in various spectroscopy and sensing systems using standard manufacturing technologies. This paper proposes a low-cost wet-etching fabrication process to realize a THz thin film polarizer with trilayer wire grids. The measured extinction ratio has an average of 60dB over 0 - 2THz.