Carbonized Polymer for Joule Heating Processing Towards Biosensor Development

This paper presents the experimental findings towards developing carbonized microelectrodes using a Joule heating process within a temperature window that is compatible with CMOS. Bridge-on-pillars polymer structures have been 3D-printed using two-photon polymerization (2PP). They have been annealed in various processing conditions to increase the fraction of carbon in the precursor material and to achieve appreciable electric conductivity so that they can be used to drive current to enable Joule heating. To evaluate the outcome of the processing sequences, Raman spectroscopy has been performed to assess the degree of carbonization. Such CMOS-compatible carbon electrodes are important for monolithic, low-cost biosensor development.Clinical relevance— This establishes the potential of carbonized polymer electrode for low-cost, CMOS-compatible monolithic biosensor platform for implementation in medical diagnosis and treatment