A comparison of unified vs. segregated automated material handling systems for 300 mm fabs

300 mm fab automation may have to evolve sooner than expected A gradual migration from the traditionally segregated interbay and intrabay automation systems to a unified Automated Material Handling Systems (unified AMHS) has already begun. This study investigates the gains realized by different configurations of unified AMHS over segregated systems. Improved reliability and performance are projected for unified AMHS configurations.