Multi-physics coupling of TSV-based toroidal inductor

The multi-physics coupling characteristics of TSV-based toroidal inductor are investigated in detail. The results show that, the temperature, stress, and electrical characteristic have serious effects on each other. As compared to the baseline case, the inductance can be changed by as much as 15.8 % and 6.8 % for p-Si and n-Si substrates respectively, and Q can be changed by as much as 6.9 % and 3.3 % for p-Si and n-Si substrates respectively. Therefore, it is very necessary for TSV-based toroidal inductor to study the multi-physics coupling characteristics.