Adaptive High Voltage Stress Methodology to Enable Automotive Quality on FinFET Technologies

High Voltage Stress Test (HVST) is critical for screening out latent defects to ensure quality on automotive semiconductor devices. This paper describes a novel way to adaptively adjust HVST stress voltage based on real-time current measurement to ensure every part is stressed reliably at the highest possible voltage within the tester hardware current limit as well as with equivalent extrinsic defect coverage on FinFET technologies.