Modified Mason’s and BVD Models For Analysis Of Spurious Modes Due To Ohmic Losses in BAW Resonators

We study the presence of an additional peak appearing at the series resonance of SMRs due to the resistance of thin metallic electrodes, especially relevant in devices with large area. To properly account for this effect, we have modified the traditional Mason and BVD models by adding a parallel branch with different series resistors. Finally, we validated these models with fabricated resonators. This work is important for SMRs sensing applications as the presence of the spurious peak can distort the response of the sensor by limiting its resolution and limit of detection.