A Novel Ring-shaped Extensional Wine-glass Mode RF-MEMS Resonator with High Quality Factors

This work presents a novel extensional wine-glass mode (EWGM) resonator with high Q values. For the first time, a flexible straight beam-frame mixing tether design was proposed, which simultaneously reduces the mechanical stiffness and optimizes the strain energy distribution. Contrast to conventional ultra-high frequency (UHF) devices suffering from severe anchor loss and high bias voltages, the proposed device exhibits superior performance. With frequency up to 548.19 MHz, the resonator can be driven into vibrations using a low bias voltage down to 7 V, while an excellent Q over 1.5 × 10
⁴
was implemented.