A hybrid-statistical approach for accurate characterization of MEMS on complex platforms

Micro-electromechanical systems (MEMS) are used in a diverse group of fields. In this paper, we are concerned with the communication and sensing applications, particularly in connection with the Reconfigurable Aperture Antenna (RECAP) project. We present a finite element method (FEM)-based approach to characterizing MEMS devices in the presence of radiators. We concentrate on modeling the MEMS switches since this problem has its own challenges. By modeling, we mean extracting a lumped element model consisting of resistors, inductors and capacitors.