Modeling and analysis of CEAH revolute -notch type multi - axis flexure hinges for spatial compliant mechanisms

Flexure hinges are basic elements for constructing compliant mechanisms for micro/nano positioning. So far, few investigations have been presented on the multi-axis flexure hinges especially with revolute type notch due to the limitation of manufacturing. In this study, the revolute-notch type multi-axis flexure hinge with Circular-Elliptical-Arc-Hybrid (CEAH) notch profile is investigated. The analytical compliance equations of the CEAH flexure hinges are developed. Finite element analysis (FEA) is carried out to confirm the presented analytical model. Finally, application of the CEAH revolute-notch type flexure hinges is discussed. The presented study demonstrates that the CEAH revolute-notch type multi-axis flexure hinges have potential advantages in developing novel spatial monolithic compliant mechanisms for three dimensional micro/nano-positioning.