Static and dynamic stability analysis of an SEM-based nanomanipulation system using a fast sub-pixel template matching algorithm

A fast sub-pixel template matching algorithm is proposed and used in the static and dynamic stability analysis of an scanning electron microscope (SEM)-based nanomanipulation system. The method is composed of a fast log search clustering-based sum of absolute differences (SAD) algorithm and a sub-pixel displacement estimation strategy. Simulation results show that the proposed method has good performance in calculation speed, measurement accuracy and robustness. Experiment results demonstrate that it takes about 11 minutes for the system to stabilize, and there is a larger drift before the system is stable. After 11 minutes, the system has good static and dynamic stability.