Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System

Due to the inherent transverse sensitivity of the piezoelectric accelerometer, it can cause transverse errors far beyond the resolution of the sensor in the measurement of a 6D micro-vibration excitation system(6D-MVES). The experiments are conducted to verify the effects of transverse errors on the measurement of 6D micro-vibration and vibration control. Moreover, the transverse sensitivity of the accelerometer and the positive direction of the transverse sensitivity axis are experimentally measured at the same time. Finally, the transverse sensitivity correction method using the transverse sensitivity correction matrix in 6D-MVES is proposed, and the improvement on the accuracy of micro-vibration measurement and control is verified by experiments.