A Magnetic Field Cancelling System Design for Mitigating Extremely Low Frequency Magnetic Field in a High Tech Fab

A magnetic field cancelling system (MFCS) integrated the active magnetic cancelling system (AM CS) and the passive magnetic cancelling system (PMCS) is addressed in this paper. For the design of the AMCS, an embedded system with the square Helmholtz coil structure is realized. In order to achieve the fast response of the AMCS against the extremely low frequency magnetic field (ELFM) change, a real-time operating system was implemented. For the design of the PMCS, permalloy material with multi-layer structure and different hole patterns are used. The experiments are conducted to validate the proposed approach in this paper.