Research on Simulation Technology of RF Microsystem Based on Hardware-in-the-Loop Simulation

RF microsystems are the development trend of the miniaturization of electronic devices in the future. As an important means to realize the efficient development of RF microsystems, high precision simulation technology is currently receiving extensive attention. Aiming at the RF microsystem in the Ku frequency band, this paper adopts the hardware-in-the-loop simulation method combining three-dimensional electromagnetic field modeling technology and MMICs cascaded circuit parameter extraction technology to realize the research and verification of the simulation method of the RF microsystem. After physical verification and testing, the simulation results are highly consistent with the test results. In the 6 ∼ 18 GHz frequency band, the simulation accuracy is better than 90%, which can meet the application requirements of high precision simulation of RF microsystems.