Analysis of Dielectric Constant and Fractal Dimension of Porous Dielectric in VLSI Based on Weight Analysis

The design process of large-scale integrated circuits is complex and time-consuming. The introduction of VLSICAD tools saves a lot of time, manpower and material resources, which is of great significance to the development of integrated circuit technology. Aiming at the difference of area and long side length of each module in VLSI layout planning, the concept of weight is put forward, and according to the difference of weight of each module; In the optimization process, the corresponding modules are selected with different probabilities, and the porous ultra-low K dielectric is simulated by using the self-similar fractal model, and its dielectric constant is analyzed. By comparing with the experimental data, we find that the experimental data are in good agreement with the results obtained according to the theory. This also proves the validity of the model.