Optimization of Microfluidic Pressure Sensing Mechanism Integrated Microcantilever in Microchannel

Microfluidic pressure sensing mechanisms are explored for various applications chemical sensing, medical, optical, and wearable field. The microfluidic pressure range for various applications is different, a novel structure is designed by introducing an integrated pressure sensing mechanism across microchannel. The laminar fluid flow across a microchannel, the velocity of a fluid is 4.33cm/sec which interacts microcantilever due to this deflection occurs and fluid pressure sensor. The sensitivity of fluid varies with the variation in height of microcantilever, observing the height of microcantilever 3H/4 of microchannel then pressure sensitivity become very high at room temperature 25°C in compare to the height of microcantilever was half of the microchannel. A paper study about the sensitivity of fluidic pressure related to the height of sensor with corresponding to the microchannel.