A high-cooperativity, nano-optomechanical system comprised of high stress Si3N4

We report the design fabrication and characterization of a monolithic nano-optomechanical transducer comprised of high stress silicon nitride (Si
3
N
4
). Our system features a one dimensional Fabry-Pérot photonic crystal cavity (Q ≈ 10
⁵
) integrated with a high-Q (Q ≈ 10
⁶
) nanobeam resonator with optomechanical cooperativity of C
0
= 23.