Sputtered Nanostructured Interfaces Used for Biochemical Sensing

In this paper we demonstrate the forming of sensoric nanostructures by sputtering without using masking and lithography. A specific sequential (cyclic) sputtering technology for preparation of non-continuous island like Au films (nanoisland arrays) was developed. Applications of nanoisland arrays are presented in the Localized Surface Plasmon Resonance sensing and together with interdigitated array of electrodes in the Electrochemical Impedance Spectroscopy sensing.