94 GHz CRLH Substrate-Integrated-Waveguide (SIW) Slot Antenna Array Using Silicon-Based IPD

This paper presents an on-chip 94 GHz composite right/left-handed (CRLH) substrate-integrated-waveguide (SIW) slot antenna array using silicon-based integrated passive device (IPD) technology. By harnessing the negative and zeroth modes of CRLH SIW resonators, the proposed silicon-based IPD antenna can demonstrate a return loss of 13.8 dB at 94 GHz, whereas the 10-dB return loss bandwidth is 6.6 GHz in the measurement. Moreover, beam steering characteristics at 94 GHz are also verified by the proposed two-element CRLH SIW array prototype excited with different progressive phases.