Fabrication tolerance impact on BIC metasurface resonances

Photonic bound states in the continuum (BICs) have recently emerged as an exciting toolkit for all-dielectric metasurfaces with sharp resonances and strong near-field enhancements. Specifically, metasurface unit cells with broken in-plane symmetry have unlocked precise control over the linewidth and therefore the quality factor (Q factor) of BIC-based resonances [1] . Combined with tunability over a wide frequency range, this approach has opened up a broad spectrum of applications from biochemical sensing [2] to higher harmonic generation [3] .