Effect of Metasurface Quality Factor on the Thermal Time Constant in Microbolometers

This paper investigates the effects of the metasurface quality on the thermal mass of metasurface integrated microbolometers. In this configuration, a temperature sensitive layer forms the insulator in a metal/insulator/metal metasurface. The geometric parameters of a hexagonal close packed disk array are optimized for perfect absorption at
$A=10.6 \mu \mathrm{m}$
for different thicknesses. Increasing the thickness of the insulator increases the quality factor but increases the thermal mass of the microbolometer.