Compact TSV-Based Hairpin Bandpass Filter for Thz Applications

A hairpin bandpass filter with compact feeder structure is proposed for terahertz (THz) applications by using the model of odd-even propagation mode. By employing the three-dimensional integrated through-silicon via (TSV) technology, the proposed filter exhibits an ultra-compact size of only
$0.24\times0.028$
mm
²
(
$1.38\times 0.16\,\,\lambda _{\mathrm {g}}^{2}$
). The model of the proposed filter is established and optimized with the HFSS tool based on finite element method. The results of
$S$
-parameters reveal that the proposed filter with center frequency at 0.5 THz, exhibits a bandwidth of 0.08 THz with insertion loss of 1.5 dB and reflection loss over 13.4 dB in the passband.