Large-Scale Monolithic InP-Based Optical Phased Array

High-speed and robust optical beam-steering device will be the key component for various applications, such as LiDAR (light detection and ranging) and free-space optical communication. Optical phased arrays (OPAs) integrated on semiconductor chips have recently received increasing attention due to the high-speed operation, compactness, and low cost. In particular, indium phosphide (InP)-based OPAs are advantageous for high-output-power applications at 1.55- μm eye-safe wavelength, owing to their capability of monolithically integrating active components, such as high-power lasers and optical amplifiers. In this letter, we design and fabricate, to the best of our knowledge, the largest-scale InP-based OPA and experimentally demonstrate its beam-steering operations. The fabricated OPA consists of 100 waveguides with carrier-injection-based phase shifters, densely integrated on 7 mm ×5 mm footprint. A focused beam width of 0.11° is steered across the free spectral range of 8.88°, corresponding to more than 80 resolvable points. This is the largest number of resolvable points obtained by a monolithic InP OPA. The response time of the OPA is confirmed to be less than 16 ns, which is limited by the driver circuit. This work paves the way for realizing compact beam-steering modules for high-speed and high-output-power imaging applications.