Circuit Design and Simulation of a 0.85 THz Regenerative Feedback Oscillator

A 0.85 THz regenerative feedback oscillator is proposed as a compact and frequency-tunable source. The circuit design and simulation is presented including both the folded waveguide slow wave structure and the feedback circuit. The bandwidth of the circuit is over 70 GHz and the output power is over 200 mW. The circuit is being fabricated using UV-LIGA micromachining process.