The First Embedded 14nm FeFinFET NVM: 2T1CFE Array as Electrical Synapses and Activations for High-performance and Low-power Inference Accelerators

We present the 1
^st
embedded 14nm FeFinFET NVMs, 2T1C
FE
. Compared to 1T1C
FE
array, 2T1C
FE
one shows 25x ↑ of the SN ratio, 10
⁴
x ↓ of the PGM power, and 10
³
x ↓ of READ power. The gradual tuning of conductance for 2T1C
FE
has been tuned linearly and symmetrically with 3x10
⁴
x of the window, where 8 separated conductance states can be stored with crystal gaps in between. Continual endurance cycles for 8 states are >10
⁷
times. The retention of 8 states has been baked in 85°C for >1 month. The 8 states have also passed the PGM disturbance test. Finally, this 2T1C
FE
array is as electrical synapses in a very deep neural network (DNN) with 23.8 million parameters for practice, and most importantly, the 2T1C
FE
is also as an activation, Rectified Linear Unit (ReLU), for the first time. Compared to the 5T-CMOS ReLU, the 2T1C
FE
ReLU shows 70%↑of inference accuracy. Overall, 2T1C
FE
shows strong potential as key components in high-performance low-power inference-accelerators.