Thin Oxide Films for Transparent Electronics and Full Color Displays

The cathodoluminescence properties of thin oxide films β-
Ga
₂
O
₃
,
ZnGa
₂
O
₄
,
ZnGn
₂
O
₄
:
Mn
,
Zn
Ga
₂
O
₄
:
Cr
,
Y
₂
O
₃
:
Eu
,
Gd
₂
O
₃
:
Eu
, (
Gd
₂
O
₃
)
_0.67
(
ZnO
)
_0.33
:
Eu
, (
Y
_0.06
Ga
_0.94
)
₂
O
₃
:
Eu
and (
Y
_0.06
Ga
_0.94
)
₂
O
₃
: Cr obtained by high-frequency (HF) ion-plasma sputtering on fused silica substrates. A number of luminescence parameters have been determined and it has been shown that a full-color flat-panel display can be realized on the basis of these films. It is shown that the use of reductive annealing of these films in a hydrogen atmosphere leads to an increase in the electrical conductivity of the films by a factor of 10
³
-10
⁸
. The results were discussed and it was found that electrically conductive thin-film phosphors β-
Ga
₂
O
₃
(blue luminescence),
Gd
₂
O
₃
:
Eu
(red luminescence) and especially (
Gd
₂
O
₃
)
_0.67
(
ZnO
)
_0.33
:
Eu
(red luminescence) are quite promising for use in full-color displays with the point of view of their luminescent and energy properties.