A Fast and Precise Time-Based Characterization Method for Sensors

This paper describes a fast and precise time-based characterization method for sensors without the need for stabilization of environmental parameters by using the time logging information of the acquired measurement data. A piezoresistive MEMS pressure sensor is presented to demonstrate the effectiveness of the time-based characterization method. Experimental results indicate that the novel characterization method reduces the characterization time by 66 times and increases the number of data samples by 5 times compared to a conventional method. The mismatch between the time-based and the conventional methods is very small, 0.028% full scale (FS) and 0.019% FS in terms of sensitivity and offset of the pressure sensor, respectively, after correction for errors on trigger time.