High Force Density Multi-Stage Electrohydrodynamic Jets using Folded Laser Microfabricated Electrodes

The electrohydrodynamic (EHD) force produced by ions ejected from a corona plasma is a solid state, silent mechanism for accelerating air, useful for applications ranging from electronics cooling to flying microrobots. This paper presents the theoretical motivation and the first implementation of a multi-stage, highly miniaturized EHD device, which can provide both improved absolute power output and power density as compared to single-stage devices. A laser microfabricated, folded electrode design reduces component count and assembly time. Data from one, two, and three-stage devices demonstrates a near linear scaling of output force with stage count, indicating inter-stage ducting successfully reduces losses. Device lifetime is assessed to validate the use of stainless-steel emission electrodes. Areal thrust, force density, and volumetric power density for the three-stage device are among the highest ever measured from an EHD actuator.