A Novel High Sensitive Mode-Localization MEMS Electric Field Sensor Based on Closed-Loop Feedback

This paper presents a novel high sensitivity mode-localization micro electric field sensor based on closed-loop feedback. The sensor is based on the principle that the mode localization effect can dramatically increase the sensitivity of a resonant system. Moreover, in order to detect the electric field in real time and improve the ability of the sensor, a closed-loop feedback is introduced. One of the output signals of the sensor is fed back to the input, where the output signal has been processed by phase-locked loop part and automatic gain control part. Tested in vacuum conditions, the minimum detectable DC electric field of the sensor is better than 10V/m, the accuracy of the sensor is 5.3%, and the repeatability is 0.56%.