Manufacturing Process Influence on SIW Resonator Permittivity Extraction Technique at Millimeter Waves

Manufacturing process influence on permittivity extraction technique on millimeter waves using substrate integrated waveguide (SIW) resonator is analysed. A model of a SIW - resonator based on optical measurements is developed. The influence of copper cladding thickness and excitation slots' properties on the resonant frequencies of a SIW - resonator operating in a 110-170 GHz band is analysed. Slots' corners rounding due to the etching process is considered. Deviation of the extracted relative permittivity is calculated. The analysed resonator structure shows its robustness against manufacturing process tolerances.